More information about how a Flow meter works in this link.
The gas mass flow controllers of FMA5400A/5500A Series provide for controlling the flow of a wide variety of gases from 0-10 SCCM up to 100 SLM. Utilizing heat transfer through a heated tube to measure molecular gas flowrate, the FMA5400A/5500A provides measurement of direct gas mass flowrate, without the need to compensate for variations in gas temperature or pressure (within stated limits). They are
available in an economical aluminum/brass construction for typical gas flows and a 316 SS construction for applications requiring more corrosion resistance. The FMA5400A series without integral display is supplied with both an analog 0-5 Vdc and 4 to 20 mA output for remote monitoring; the FMA5500A series has both an integral 3-1/2 digit display and analog output. The display is tiltable over 90 degrees for viewing convenience. The display is calibrated standard to read out directly in SCCM or SLM for nitrogen (other gas calibrations available on special order).
The FMA5400A/5500A mass flow controllers feature a built-in normally-closed electromagnetic valve for maintaining a constant flowrate regardless of variations in inlet or outlet pressures. The setpoint is controlled either locally via a potentiometer accessible through an access window in the case or
remotely via an analog 0-5 Vdc or 4-20 mA signal (field selectable). The FMA5400A/5500A series require 12 to 26 Vdc power @ 800 mA maximum, which can be supplied by the FMA545PW wall plug-in socket power supply. The electronics are reverse polarity
protected and have a resettable fuse. Model number FMA545C (supplied separately) provides a mating 15-pin “D” connector with 8 feet of shielded cable for accessing the analog output signals and power input connections. The LCD supplied with the FMA5500A series is connected to the lower electronics via a modular plug. The LCD can be remotely located by purchasing an FMA18RC remote cable assembly–you must then build your own assembly for panel mounting the LCD.
SPECIFICATIONS Accuracy: ±1.5% FS, including linearity over 15 to 25°C (59 to 77°F) and
0.7 to 4.2 kg/cm² (10 to 60 psia) ±3% FS for units ≥ 100 SLM from o to 20% of range. Repeatability: ±0.5% of full scale Temp Coefficient: 0.15% FS/°C Pressure Coefficient: 0.01% FS per psi (0.07 bar) Maximum Pressure Drop: 50 psid Response Time: 5 seconds to within ±2% of set flow rate over 25 to 100% FS Max Gas Pressure: 70 kg/cm² gauge (1000 psig)(For units up to 100 SLM); 35 kg/cm² gauge (500 psig); 1.76 kg/cm (25 psig) optimum Gas and Ambient Temp: 5 to 50°C (41 to 122°F) Leak Integrity: 1 x 10-7 cc/sec of He max to outside environment Materials in Fluid Contact: Aluminum Models: Anodized aluminum, 316 SS, brass and FKM O-rings Stainless Steel Models: 316 SS and FKM O-rings Output Signal: Linear 0 to 5 Vdc: 1000 Ω minimum load 4 to 20 mA: 50 to 500 Ω loop resistance, ±20 mV max noise Transducer Power: 12 to 26 Vdc @ 800 mA Turndown Ratio: 50:1 Shipping Weight: 1.8 kg (4 lb) Compliance: EN55011 class 1, class B; EN50082-1 Attitude Sensitivity: With horizontal flow path, no shift in calibration up to +20 degree pitch Gas Relative Humidity: 0 to 70% RH Min Pressure Drop
† All amounts shown in EUR, GBP, or USD Note: * Comes with ¾ FNPT connections instead of compression fittings.
Comes complete with compression fittings, NIST certificate and operator’s manual.
Power supplies sold separately.
Flow ranges specified are for nitrogen or air at 20 psig inlet (up to 50 SLM) or 25 psig inlet(60 to 100 SLM units) and 0 psig outlet. When used with other gases, a multiplication factor is used to determine the flow rate, and the digital display must be rescaled in the field.
To request a custom calibration add the gas abbreviation and inlet pressure/outlet pressure as a suffix to the model number.
Calibrations are done at ambient temperatures only, 20°C (70°F).
For Oxygen (O2) cleaned units, add suffix “O2CLEAN” to model number for additional cost. Ordering Example: (1) FMA5506A-ST 316SS Mass Flow Controller 50 sccm, £695.00 plus (1) FMA545PW-220VAC Power Supply for Europe, £47.00, £695.00 + 47.00 = £742.00
Part Number Builder
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Display select from: 54 for without display 55 for with display
Range Code(see table above) select from: 02 for code 02 04 for code 04 06 for code 06 08 for code 08 10 for code 10 12 for code 12 14 for code 14 16 for code 16 18 for code 18 20 for code 20 22 for code 22 24 for code 24 26 for code 26 28 for code 28 40 for code 40 41 for code 41 42 for code 42
Body select from: Nothing(leave field blank) for aluminium/brass body -ST for 316 SS body
Note: All combinations may not be valid, check spec sheet for valid part numbers.